Micro-Raman and Spreading Resistance Analysis on Beveled Implanted Germanium for Layer Transfer Applications
نویسندگان
چکیده
D Micro-Raman and Spreading Resistance Analysis on Beveled Implanted Germanium for Layer Transfer Applications Paul Rainey,* Joanna Wasyluk, Tatiana Perova, Richard Hurley, Neil Mitchell, David McNeill, Harold Gamble,* and Mervyn Armstrong School of Electrical Engineering and Computer Science, Northern Ireland Semiconductor Research Center, The Queen’s University of Belfast, Belfast, BT9 5AH, Northern Ireland, United Kingdom Department of Electronic and Electrical Engineering, University of Dublin, Trinity College, Dublin 2, Ireland
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